| Quarter > Kate Gleason Col Of Engrng > Microelectronic Engineering > Intro To Microlithograph > Description |
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| Course Description |
| Course Number: |
0305-221 |
Course Title: |
Intro To Microlithograph |
Description: |
| This course provides an introduction to the fundamentals of micro/nanolithography. Topics include IC masking, sensitometry, radiometry, resolution, contact lithography, projection lithography, photoresist materials and processing. Laboratories include mask making, source characterization, resist characterization, and stepper operation. (1011-208) Class 3, Lab 3, Credit 4 (S) |
Course Notes: |
| 0305-221 PREREQUISITE: 1011-208 |
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