| Quarter > Kate Gleason Col Of Engrng > Microelectronic Engineering > Microlithography Sys Lab > Description |
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| Course Description |
| Course Number: |
0305-574 |
Course Title: |
Microlithography Sys Lab |
Description: |
| Laboratory to be taken concurrently with 0305-564. Topics emphasize optical microlithography modeling, illumination systems, reticle enhancement techniques, alignment, and optimization of image capture related to focus, exposure and substrate reflectivity. Class 0, Lab 3, Credit 1 (S, SU) |
Course Notes: |
| No Course Notes Available |
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