| Quarter > Kate Gleason Col Of Engrng > Microelectronic Engineering > Microlith Mtls & Pro Lab > Description |
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| Course Description |
| Course Number: |
0305-676 |
Course Title: |
Microlith Mtls & Pro Lab |
Description: |
| Laboratory will be taken concurrently with 0305-666. Materials characterizations and process optimizations will utilize experimental design techniques. Processes to be studied include development rate monitoring. DUV resists, BARC, resist silylation and SEM evaluation of imaged resists and etched structures. Class 0, Lab 3, Credit 1 (F, W) |
Course Notes: |
| No Course Notes Available |
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