| Quarter > Kate Gleason Col Of Engrng > Microelectronic Engineering > Semicon Proc & Dev Model > Description |
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| Course Description |
| Course Number: |
0305-704 |
Course Title: |
Semicon Proc & Dev Model |
Description: |
| A senior graduate level course on the application of simulation tools for design and verification of microelectronic processes and operation of semiconductor devices. Technology CAD tools include Silvaco (Athena/Atlas) process/device simulators, as well as other simulation tools for specific processes, and math programs that can be used for custom simulation. Various models that describe front end silicon processes are explored emphasizing the importance of complex interactions and 2D effects, as devices are scaled deep submicron. Includes laboratory exercises on simulation and modeling. (0305-560, 701, 702) Class 3, Lab 3, Credit 4 (W) |
Course Notes: |
| 0305-704 Prerequisites: 0305-560, 701, 702 |
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